Optical Lithography is a process used in microfabrication techniques which has many principles shared with photographic techniques.The process involves the use of ultra violet light in the formation of patterns on a photoresist layer that can be transferred, by selective etching, into an underlying wafer surface. The techniques are commonly utilised in Semiconductor and photonic wafer fabrication and also utilised in roll-to-roll nanoimprinting for emerging metamaterials technology fabrication.
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